Plasma System Design
At the heart of our research is the design of cost-effective plasma devices for material synthesis and modification. We continuously strive to build affordable systems that can be easily used for different purposes. These include devices for thin film growth and surface modification. Moreover, efforts of building atmospheric plasma devices have been underway as well. Some of the devices we have designed and built are:
  • 13.56 MHz RF Plasma System (High Vacuum)
  • Plasma-enhanced Chemical Vapor Deposition System
  • DC-powered Plasma System
  • Microwave Plasma System
  • Atmospheric Pressure Jet Plasma
In addition, the laboratory was also able to restore or refurbish old plasma equipment such as:
  • 13.56 MHz RF Plasma System (Low Vacuum)
  • Magnetron Sputtering System
  • Magnetized Sheet Plasma System
Ion Source Design
Thin Films
Surface Engineering
Materials Modeling